设备名称 Equipment Name

管式二合一PECVD设备  Horizontal PECVD (Two-In-One)

设备型号 Equipment Model

PD-520/PD-520L/PD-520MAX

设备用途 Equipment Application

AlO+SiN薄膜沉积。

AlOx+SiN deposition.

技术特点  Features

1、AlOx+SiN二合一同管完成，减少工艺环节，有效提升良率、降低碎片率。
The AIOx & SiN layers can be coated in the same furnace tube which helps in reducing the process steps,improving the yield and lowering the breakage rate effectively.  

2、单机产能优越的二合一配置方案。
Optimal throughout solution: two-in-one configuration. 

设备参数  Parameters